The special system Tetra 500, with its 500-litre chamber volume and PCcontrol, is used in series production (cleaning, etching and activation of, forexample, films).
Special plasma system Tetra 500-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 2100 mm, D 800 mm
Chamber:
W 1500 mm, H 1700 mm, D 200 mm
Chamber volume:
approx. 500 litres
Gas supply:
3 gas channels via MFCs
Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Parts holding:
2 Roll-to-Roll systems
PC control (Windows) with industrial field bus